Max. Actuation Voltage 70 V; Package TO46, TO5; Reflectivity 95%; Mirror Size 1 mm to 2.5 mm; Tilt Angle ±2.5° to ±4.5°
Electrostatic driven MEMS mirrors are used in applications where a high pointing stability is required. The electrostatic drive has superior DC performance and is the solution of choice for advanced fiber optic light processing such as in MEMS variable optical attenuators, fiber optic switches and tunable optical filters. Mirror diameters range from 0.8 mm up to 2.5 x 2.0 mm.
The Sercalo MEMS 3D mirrors are used for precise optical beam steering. To avoid an optical feedback loop, the micromirror is designed to minimize effects such as drift, hysteresis and temperature dependent performance. The angle is set using electrostatic actuation.
Two Independent Axes
1 mm Diameter Mirror
High Fill Factor
Applications: Optical Beam Steering; Reconfigurable Add-Drop Multiplexer; Vibration Control in Free Space Optics; Optical Processor