IPEX-800 Excimer Lasers

AMS item number: SW11157

193-351 nm; Energy 0.150-0.700 J; Max. Rep-rate 10-200 Hz; Average Power 3-80 W; Pulse Duration... more

Product information "IPEX-800 Excimer Lasers"

193-351 nm; Energy 0.150-0.700 J; Max. Rep-rate 10-200 Hz; Average Power 3-80 W; Pulse Duration 12-20 ns FWHM; Beam Size 12x26, 12x28 mm; High Duty Cycle Operation

Designed for high duty cycle operation in a manufacturing environment, Light Machinery’s IPEX-800 series of excimer lasers deliver high power ultraviolet laser machining combined with state-of-the-art performance.

The largest single cost of operating an excimer laser is laser gas consumption while running the laser (also known as dynamic gas lifetime). Incorporating LightMachinery’s proprietary ICON™ (Integrated Ceramic on Nickel) and patented exciPure™ technologies, IPEX lasers offer extremely long gas lifetimes, superior optical stability and precise control of laser operating parameters. With exciPure™, LightMachinery has achieved a 10x improvement in gas usage over competing lasers. This technological breakthrough leads to dramatically less cost to run your laser.

EasyClean automated valves fitted to the optics ports allow the laser chamber to be sealed and the gas fill/passivation to be retained while resonator optics are removed for cleaning and maintenance. Easy to use, simple to service and economical to operate, IPEX-800 lasers combine the benefits of high precision excimer processing with the lowest total cost of ownership and highest uptime in the market today. Marking of ceramics is one of many applications for these versatile industrial tools.

Key Features:

High Duty Cycle Operation
Wavelengths: 193 nm (ArF), 248 nm (KrF), 308 nm (XeCl), 351 nm (XeF)
Maximum Pulse Energy: 230 to 700 mJ
Stabilized Pulse Energy: 150 to 600 mJ
Stabilized Average Power: 3 to 80 W
Maximum Repetition Rate: 10 to 200 Hz
Pulse Duration: 12 to 20 ns FWHM
exciPure™ Technology for 10x Gas Lifetimes, Long Replacement Intervals and Lowest Cost of Operation
No Expensive Cryogenic Gas Purifier Required
EasyClean Automated Optics Seals to Retain Gas Fill and Reduce Downtime During Optics Maintenance
Optional High-Brightness Optics for Applications Requiring Low Beam Divergence or Extended Coherence Length
High-stability Optics Mounts for Ultimate Beam Pointing Accuracy
Simple Integration into Industrial Processing Systems
Simplified Optical Maintenance, Retained Gas Fill and Passivation
No Realignment Required After Cleaning or Replacing Optics
Fast, Precise Energy Stabilization (<1.0%, KrF Gas) in Internal, Burst and External Trigger Modes
Removes Particulates and Maintains Optics Cleanliness
Pointing Stability: 200 µrad
Beam Size: 12x26, 12x28 mm
Beam Divergence (Vertical x Horizontal): 1x3 mrad, Can be Reduced to 0.25 mrad With High-brightness Unstable Resonator Optics
Cooling Requirements: Optional Air Cooling up to 25 Hz Operation, Water Cooling at Higher Repetition Rates
Laser Gas: Premix or Individual Cylinders

Applications: 24/ 7 Pulsed Laser Deposition; Precision Manufacturing; Material Processing; Drilling; Wire Stripping; Scientific Research; LIDAR; Laser Induced Breakdown Spectroscopy

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